X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er Thin Films

  • Iwan Sugihartono Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220
  • Esmar Budi Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220
  • Agus Setyo Budi Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220

Abstract

Undoped ZnO and ZnO:Er  thin films were deposited on p-type Si substrates by ultrasonic spray pyrolisis (USP). Undoped and ZnO:Er thin films have been analyzed by using X-ray Photoelectron Spectroscopy (XPS). The results show that the XPS spectrum has two Er peak at ∼157 eV and ∼168 eV. The XPS Zn 2p spectrum of undoped ZnO and ZnO:Er thin films have binding energy for Zn 2p3/2 (~ 1021 eV) and Zn 2p1/2 (~1045eV) were found no shift in binding energy after the incorporation of Er. Meanwhile, after Er incorporates into ZnO, the O 1s spectrum is composed two peak of binding energy (BE) at ~530.5eV and the shoulder about 532.5 eV.


Keywords: ZnO thin films, ZnO:Er, XPS, binding energy

Published
2015-06-11
How to Cite
SUGIHARTONO, Iwan; BUDI, Esmar; BUDI, Agus Setyo. X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er Thin Films. Jurnal ILMU DASAR, [S.l.], v. 16, n. 1, p. 13-15, june 2015. ISSN 2442-5613. Available at: <https://jurnal.unej.ac.id/index.php/JID/article/view/1052>. Date accessed: 02 june 2020. doi: https://doi.org/10.19184/jid.v16i1.1052.
Section
General